Wafer atomosphere robots

Model name
AR-S300H-300

AR-W300H-300

AR-S300R-300
TypeSingle armDouble armRevers single arm
Wafer size (mm)~450~450~300
A(B)-axis (mm)510510510
θ-axis (°)330330330
Z-axis (mm)300300300
Transport weight (kg)333
Products detail

Wafer vacuum robots

Model name
AR-SV350G

AR-WV350

AR-WV300
TypeSingle armDouble armDouble arm
Wafer size (mm)~450~450~300
A(B)-axis (mm)705760545
θ-axis (°)330
Z-axis (mm)505050
Transport weight (kg)621
Products detail

Glass atmosphere robots

Model name
AR-3GS/3GW

AR-4GS/4GW

AR-3GSR/4GSR
Glass size (mm)~550 * 650~730 * 920~730 * 920
A(B)-axis (mm)112014601480 ~ 1840
θ-axis (°)330330330
Z-axis (mm)400/520/600800/1000400 ~ 1000
R-axis (°)185
Transport weight (kg)5104 ~ 8
Products detail/ //

Glass vacuum robots

Model name
AR-SV3G

AR-SV5G/WV5G

AR-WV5.5G

AR-WV6G/WV8.5G
Glass size (mm)~550 * 650~1100 * 1300~1300 * 1500~2200 * 2500
A(B)-axis (mm)1030175023802520/3640
θ-axis (°)330
Z-axis (mm)100350350600/780
Transport weight (kg)420/155050/130
Products detail//