Wafer atomosphere robots
Wafer vacuum robots
Model name | AR-SV350G | AR-WV350 | AR-WV300 |
Type | Single arm | Double arm | Double arm |
Wafer size (mm) | ~450 | ~450 | ~300 |
A(B)-axis (mm) | 705 | 760 | 545 |
θ-axis (°) | ∞ | ∞ | 330 |
Z-axis (mm) | 50 | 50 | 50 |
Transport weight (kg) | 6 | 2 | 1 |
Products detail |