Wafer atomosphere robots
Wafer vacuum robots
| Model name | ![]() AR-SV350G | ![]() AR-WV350 | ![]() AR-WV300 |
| Type | Single arm | Double arm | Double arm |
| Wafer size (mm) | ~450 | ~450 | ~300 |
| A(B)-axis (mm) | 705 | 760 | 545 |
| θ-axis (°) | ∞ | ∞ | 330 |
| Z-axis (mm) | 50 | 50 | 50 |
| Transport weight (kg) | 6 | 2 | 1 |
| Products detail |













